- 专利标题： Cubic Al-rich AlTiN Coatings Deposited from Ceramic Targets
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申请号： US17291841申请日： 2019-11-11
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公开(公告)号： US20210395875A1公开(公告)日： 2021-12-23
- 发明人: Siva Phani Kumar Yalamanchili , Denis Kurapov , Tomoya Sasaki , Kazuyuki Kubota
- 申请人： Oerlikon Surface Solutions AG, Pfäffikon , MOLDINO Tool Engineering, Ltd.
- 申请人地址： CH Pfaffikon; JP Tokyo
- 专利权人： Oerlikon Surface Solutions AG, Pfäffikon,MOLDINO Tool Engineering, Ltd.
- 当前专利权人： Oerlikon Surface Solutions AG, Pfäffikon,MOLDINO Tool Engineering, Ltd.
- 当前专利权人地址： CH Pfaffikon; JP Tokyo
- 国际申请： PCT/EP2019/080809 WO 20191111
- 主分类号： C23C14/06
- IPC分类号： C23C14/06 ; C23C14/34
摘要：
The present invention discloses a non-reactive PVD coating process for producing an aluminium-rich AlxTi1−xN-based thin film having an aluminium content of >75 at-% based on the total amount of aluminium and titanium in the thin film, a cubic crystal structure, and a columnar microstructure, wherein ceramic targets are used as a material source for the aluminium-rich AlxTi1−xN-based thin film.
公开/授权文献
- US12006564B2 Cubic Al-rich AlTiN coatings deposited from ceramic targets 公开/授权日：2024-06-11
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