Invention Application
- Patent Title: APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS
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Application No.: US17213726Application Date: 2021-03-26
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Publication No.: US20220006015A1Publication Date: 2022-01-06
- Inventor: Junhyeuk KO , Euigyu KIM , Minseok KIM , Bongjun KIM , Haram YOO , Kyunghoon CHUNG
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2020-0082263 20200703
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L21/683

Abstract:
An apparatus for manufacturing a display apparatus includes a substrate. A mask assembly includes an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame. An electrostatic chuck is configured to attach the substrate to the at least one mask. A first driver is configured to drive the electrostatic chuck. At least a partial portion of the mask frame does not overlap the electrostatic chuck in a thickness direction of the substrate.
Information query
IPC分类: