公开(公告)号：US20220006015A1

公开(公告)日：2022-01-06

申请号：US17213726

申请日：2021-03-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Junhyeuk KO ,  Euigyu KIM ,  Minseok KIM ,  Bongjun KIM ,  Haram YOO ,  Kyunghoon CHUNG

IPC: H01L51/00 ,  H01L21/683

Abstract: An apparatus for manufacturing a display apparatus includes a substrate. A mask assembly includes an opening, a mask frame surrounding the opening, and at least one mask coupled to the mask frame. An electrostatic chuck is configured to attach the substrate to the at least one mask. A first driver is configured to drive the electrostatic chuck. At least a partial portion of the mask frame does not overlap the electrostatic chuck in a thickness direction of the substrate.