Invention Application
- Patent Title: ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER
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Application No.: US17473188Application Date: 2021-09-13
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Publication No.: US20220009106A1Publication Date: 2022-01-13
- Inventor: Paul Z. Wirth , Charles T. Carlson , Jason M. Schaller
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B25J11/00
- IPC: B25J11/00 ; B25J9/12 ; B25J9/00 ; H01L21/687 ; B25J9/04 ; H01L21/677

Abstract:
Exemplary substrate processing systems may include a transfer region housing defining a transfer region fluidly coupled with a plurality of processing regions. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a transfer apparatus having a central hub including a shaft extending at a distal end through the transfer region housing into the transfer region. The transfer apparatus may include a lateral translation apparatus coupled with an exterior surface of the transfer region housing, and configured to provide at least one direction of lateral movement of the shaft. The systems may also include an end effector coupled with the shaft within the transfer region. The end effector may include a plurality of arms having a number of arms equal to a number of substrate supports of the plurality of substrate supports in the transfer region.
Public/Granted literature
- US11590662B2 Robot for simultaneous substrate transfer Public/Granted day:2023-02-28
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