Invention Application
- Patent Title: METHOD AND APPARATUS FOR STAMP GENERATION AND CURING
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Application No.: US17489551Application Date: 2021-09-29
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Publication No.: US20220057710A1Publication Date: 2022-02-24
- Inventor: Michael Y. YOUNG , Ludovic GODET , Robert J. VISSER
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
Methods and apparatus for stamp generation are disclosed using nano-resist and ultra violet blocking materials. In one non-limiting embodiment, a method of producing a copy of a stamp for generating electrical/optical components is disclosed comprising: providing the stamp; coating a bottom surface of the stamp with a ultra violet blocking material; curing the ultra violet blocking material on the bottom surface; contacting the stamp to a target substrate covered with a layer of imprint resist; curing the imprint resist with ultraviolet blocking material during the contacting of the stamp to the target substrate; and releasing the stamp from the target substrate with the cured layer of imprint resist.
Information query