- 专利标题: Method of Manufacturing Bipolar Complementary-Metal-Oxide-Semiconductor (BiCMOS) Devices Using Nickel Silicide
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申请号: US17465246申请日: 2021-09-02
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公开(公告)号: US20220068914A1公开(公告)日: 2022-03-03
- 发明人: Mantavya Sinha , Edward Preisler , David J. Howard
- 申请人: Newport Fab, LLC dba Jazz Semiconductor
- 申请人地址: US CA Newport Beach
- 专利权人: Newport Fab, LLC dba Jazz Semiconductor
- 当前专利权人: Newport Fab, LLC dba Jazz Semiconductor
- 当前专利权人地址: US CA Newport Beach
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L29/732 ; H01L29/45 ; H01L21/324 ; H01L21/8249
摘要:
A bipolar complementary-metal-oxide-semiconductor (BiCMOS) device includes a MOS transistor including CMOS nickel silicided regions in a CMOS region, and a bipolar transistor in a bipolar region. The bipolar transistor includes a nickel silicided emitter, a collector, and a base including an intrinsic base, a link base, and a nickel silicided extrinsic base. The intrinsic base is situated between the nickel silicided emitter and the collector. A dielectric spacer separates the link base from the nickel silicided emitter. The nickel silicided extrinsic base provides an electrical connection to the link base and the intrinsic base. A nickel silicided collector sinker provides an electrical connection to the collector. The CMOS nickel silicided regions, nickel silicided emitter, nickel silicided extrinsic base, and nickel silicided collector sinker can include an additive of molybdenum (Mo) and/or platinum (Pt). A low temperature rapid thermal anneal can be performed so as to prevent deactivation of dopants.
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