- 专利标题: MULTI-LAYER PIEZOELECTRIC SUBSTRATE WITH CONTROLLABLE DELTA TEMPERATURE COEFFICIENT OF FREQUENCY
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申请号: US17462258申请日: 2021-08-31
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公开(公告)号: US20220077840A1公开(公告)日: 2022-03-10
- 发明人: Joshua James Caron
- 申请人: SKYWORKS SOLUTIONS, INC.
- 申请人地址: US CA Irvine
- 专利权人: SKYWORKS SOLUTIONS, INC.
- 当前专利权人: SKYWORKS SOLUTIONS, INC.
- 当前专利权人地址: US CA Irvine
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/25 ; H03H9/64 ; H03H9/145
摘要:
An electronic device includes a multi-layer piezoelectric substrate including a carrier substrate, a layer of piezoelectric material disposed on a front side of the carrier substrate, and a back-side layer of material disposed on a rear side of the carrier substrate, the back-side layer of material having a coefficient of thermal expansion different than a coefficient of thermal expansion of the carrier substrate, and one or more acoustic wave devices disposed on a front side of the multi-layer piezoelectric substrate, the one or more acoustic wave devices exhibiting a lesser difference in temperature coefficient of frequency at respective resonant and antiresonant frequencies than in a substantially similar device lacking the back-side layer of material.
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