- 专利标题: GAN SUBSTRATE WAFER AND METHOD FOR MANUFACTURING SAME
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申请号: US17536252申请日: 2021-11-29
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公开(公告)号: US20220084819A1公开(公告)日: 2022-03-17
- 发明人: Kenji ISO , Yuuki ENATSU , Kenji SHIMOYAMA
- 申请人: MITSUBISHI CHEMICAL CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: MITSUBISHI CHEMICAL CORPORATION
- 当前专利权人: MITSUBISHI CHEMICAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2019-101183 20190530,JP2019-113569 20190619
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; C30B25/20 ; H01L29/20
摘要:
Provided are: a GaN substrate wafer having a crystallinity suitable as a substrate for a semiconductor device as well as an improved productivity; and a method of producing the same. The GaN substrate wafer is a (0001)-oriented GaN substrate wafer that includes a first region arranged on an N-polar side and a second region arranged on a Ga-polar side via a regrowth interface therebetween. In this GaN substrate wafer, the second region has a minimum thickness of not less than 20 μm, the concentration of at least one element selected from Li, Na, K, F, Cl, Br, and I in the first region is 1×1015 atoms/cm3 or higher, and the second region satisfies one or more conditions selected from the following (a) to (c): (a) the Si concentration is 5×1016 atoms/cm3 or higher; (b) the O concentration is 3×1016 atoms/cm3 or lower; and (c) the H concentration is 1×1017 atoms/cm3 or lower.
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