Invention Application
- Patent Title: LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
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Application No.: US17404231Application Date: 2021-08-17
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Publication No.: US20220084823A1Publication Date: 2022-03-17
- Inventor: HIROSHI OKUMURA , JONGJUN BAEK , BYUNG SOO SO
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si
- Priority: KR10-2020-0117901 20200914
- Main IPC: H01L21/02
- IPC: H01L21/02 ; G02B26/10 ; G02B5/04

Abstract:
A laser irradiation apparatus includes a laser light source which emits a laser beam, a first lens through which the laser beam emitted from the laser light source passes, a first scanner which reflects the laser beam passing through the first lens and changes a direction of the laser beam, a second scanner which reflects the laser beam deflected by the first scanner and changes a direction of the laser beam, a plurality of second lenses through which the laser beam deflected by the second scanner passes, where at least one of the plurality of second lenses is configured to vibrate in one direction, and an optical element through which the laser beam passing through the plurality of second lenses passes, where the optical element is configured to correct an incident angle of the laser beam incident a substrate.
Public/Granted literature
- US12040186B2 Laser irradiation apparatus and laser irradiation method Public/Granted day:2024-07-16
Information query
IPC分类: