Invention Application
- Patent Title: COMPOSITE SINTERED BODY, SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER AND METHOD OF PRODUCING COMPOSITE SINTERED BODY
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Application No.: US17447102Application Date: 2021-09-08
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Publication No.: US20220084865A1Publication Date: 2022-03-17
- Inventor: Keita MIYANISHI , Kyohei ATSUJI , Asumi NAGAI , Hirofumi YAMAGUCHI , Soichiro AOYAGI
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya-City
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Nagoya-City
- Priority: JP2020-153841 20200914,JP2021-105533 20210625
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B32B37/06 ; B32B9/00 ; C04B22/04 ; C04B22/06
Abstract:
A composite sintered body includes a base material that contains Al2O3 as a main component, and an electrode arranged inside or on a surface of the base material. The electrode contains Ru, ZrO2, and Al2O3.
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