发明申请
- 专利标题: SILVER NANOPARTICLES SYNTHESIS METHOD FOR LOW TEMPERATURE AND PRESSURE SINTERING
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申请号: US17492356申请日: 2021-10-01
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公开(公告)号: US20220108975A1公开(公告)日: 2022-04-07
- 发明人: Cristina MANOLA , Rosa Lucia TORRISI , Simone RASCUNÀ , Gabriele BELLOCCHI , Annalinda CONTINO , Giuseppe MACCARRONE
- 申请人: STMICROELECTRONICS S.r.l. , STMICROELECTRONICS S.r.l.
- 申请人地址: IT Agrate Brianza; IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.r.l.,STMICROELECTRONICS S.r.l.
- 当前专利权人: STMICROELECTRONICS S.r.l.,STMICROELECTRONICS S.r.l.
- 当前专利权人地址: IT Agrate Brianza; IT Agrate Brianza
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/495 ; B22F9/24 ; B22F1/00
摘要:
The disclosure is directed to wide band-gap semiconductor devices, such as power devices based on silicon carbide or gallium nitride materials. A power device die is attached to a carrier substrate or a base using sintered silver as a die attachment material or layer. The carrier substrate is, in some embodiments, copper plated with silver. The sintered silver die attachment layer is formed by sintering silver nanoparticle paste under a very low temperature, for example, lower than 200° C. and in some embodiments at about 150° C., and with no external pressures applied in the sintering process. The silver nanoparticle is synthesized through a chemical reduction process in an organic solvent. After the reduction process has completed, the organic solvent is removed through evaporation with a flux of inert gas being injected into the solution.
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