Invention Application
- Patent Title: BULK WAFER SWITCH ISOLATION
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Application No.: US17069098Application Date: 2020-10-13
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Publication No.: US20220115262A1Publication Date: 2022-04-14
- Inventor: Uzma RANA , Anthony K. STAMPER , Steven M. SHANK , Brett T. CUCCI
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/26

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to bulk wafer switch isolation structures and methods of manufacture. The structure includes: a bulk substrate material; an active region on the bulk substrate material; an inactive region adjacent to the active region; and an amorphous material covering the bulk substrate material in the inactive region, which is adjacent to the active region.
Public/Granted literature
- US11322387B1 Bulk wafer switch isolation Public/Granted day:2022-05-03
Information query
IPC分类: