Invention Application
- Patent Title: Method for Forming Packaged Semiconductor Die with Micro-Cavity
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Application No.: US17556790Application Date: 2021-12-20
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Publication No.: US20220115282A1Publication Date: 2022-04-14
- Inventor: Matthias Klein , Andreas Zakrzewski , Richard Gruenwald
- Applicant: Microchip Technology Inc.
- Applicant Address: US AZ Chandler
- Assignee: Microchip Technology Inc.
- Current Assignee: Microchip Technology Inc.
- Current Assignee Address: US AZ Chandler
- Main IPC: H01L23/16
- IPC: H01L23/16 ; H01L23/31 ; H01L23/00 ; H01L21/56

Abstract:
A method for forming a packaged electronic die includes forming a plurality of bonding pads on a device wafer. A photoresist layer is deposited over the device wafer and is patterned so as to form a photoresist frame that completely surrounds a device formed on the device wafer. Conductive balls are deposited over the bonding pads. The wafer is cut to form the electronic die and the electronic die is placed over the substrate. The conductive balls are heated and compressed, moving the electronic die closer to the substrate such that the photoresist frame is in direct contact with the substrate or with a landing pad formed on the substrate. Encapsulant material is deposited such that the encapsulant material covers the electronic die and the substrate. The encapsulant material is cured so as to encapsulate the electronic die. The substrate is cut to separate the packaged electronic die.
Public/Granted literature
- US11538726B2 Method for forming packaged semiconductor die with micro-cavity Public/Granted day:2022-12-27
Information query
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