Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME
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Application No.: US17331951Application Date: 2021-05-27
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Publication No.: US20220115294A1Publication Date: 2022-04-14
- Inventor: Sunggil KIM , Jinhyuk KIM , Jung-Hwan KIM
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0131406 20201012
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L29/78 ; H01L27/11556 ; H01L27/11582 ; H01L25/065

Abstract:
A semiconductor device and an electronic system, the device including a substrate including a cell array region and a connection region; a stack including electrodes vertically stacked on the substrate; a source conductive pattern on the cell array region and between the substrate and the stack; a dummy insulating pattern on the connection region and between the substrate and the stack; a conductive support pattern between the stack and the source conductive pattern and between the stack and the dummy insulating pattern; a plurality of first vertical structures on the cell array region and penetrating the electrode structure, the conductive support pattern, and the source structure; and a plurality of second vertical structures on the connection region and penetrating the electrode structure, the conductive support pattern, and the dummy insulating pattern.
Public/Granted literature
Information query
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