BULK-ACOUSTIC WAVE FILTER DEVICE
摘要:
A bulk-acoustic wave filter device includes: a substrate; a resonance portion in which a cavity is disposed between the substrate and the resonance portion; and a cap configured to form an internal space together with the substrate, wherein filling gas including at least one of hydrogen gas and helium gas is filled in at least one of the cavity and the internal space formed by the substrate and the cap.
信息查询
0/0