Invention Application
- Patent Title: TECHNIQUES FOR VARIABLE DEPOSITION PROFILES
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Application No.: US17072130Application Date: 2020-10-16
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Publication No.: US20220119955A1Publication Date: 2022-04-21
- Inventor: M. Arif Zeeshan , Shantanu Kallakuri , Joseph C. Olson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C23C16/56
- IPC: C23C16/56 ; C23C16/04

Abstract:
Embodiments of the present disclosure include positioning a mask over a substrate, wherein the mask has a planar surface separated from a top surface of the substrate by a mask distance, and wherein a mask opening is provided through the planar surface. The method may further include positioning a mask element across the mask opening, the mask element including one or more solid portions and one or more openings, and depositing, through the mask opening, a deposition material onto the substrate, wherein the deposition material has a variable profile as a result of the one or more solid portions and the one or more openings.
Information query
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