According to an aspect of the present inventive concept there is provided a method for forming source/drain contacts, the method comprising: depositing a material layer over a first and second layer stack formed in a first and second device region of a substrate, respectively, each layer stack comprising a number of semiconductor channel layers and the layer stacks being separated by a trench filled with insulating material to form an insulating wall between the layer stacks and between the device regions; forming a contact partition trench in the material layer at a position above the insulating wall, and filling the contact partition trench with an insulating material to form a contact partition wall on top of the insulating wall; forming a first and a second source/drain contact trench on mutually opposite sides of the contact partition wall, the first source/drain contact trench being formed above a source/drain region in the first device region, and the second source/drain contact trench being formed above a source/drain region in the second device region, and the source/drain regions in the first and the second device region being separated by the insulating wall; and forming a first contact in the first source/drain contact trench and a second contact in the second source/drain contact trench, wherein the first and second contacts are separated by the contact partition wall.