Invention Application
- Patent Title: WAFER PLACEMENT TABLE
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Application No.: US17305173Application Date: 2021-07-01
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Publication No.: US20220124874A1Publication Date: 2022-04-21
- Inventor: Seiya INOUE , Reo WATANABE , Yuma IWATA
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya-City
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Nagoya-City
- Priority: JP2020-174775 20201016
- Main IPC: H05B1/02
- IPC: H05B1/02 ; H01L21/687 ; H05B3/03 ; H05B3/14 ; H05B3/26

Abstract:
A wafer placement table includes a ceramic plate, an electrode embedded in the ceramic plate, a hollow ceramic shaft attached to a surface of the ceramic plate, a power-supplying member running inside the ceramic shaft and connected to a terminal of the electrode, a plate-side attaching site defined on the ceramic plate and to which the power-supplying member is attached, a power-source-side attaching site defined at a free end of the ceramic shaft and to which the power-supplying member is attached, and a redirecting member provided inside the ceramic shaft. The power-source-side attaching site is defined in correspondence with the plate-side attaching site and in such a manner as to be shifted from the plate-side attaching site in plan view. The redirecting member holds the power-supplying member such that the power-supplying member extending from the power-source-side attaching site is forcibly redirected toward the plate-side attaching site.
Public/Granted literature
- US12150215B2 Wafer placement table Public/Granted day:2024-11-19
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