Invention Application
- Patent Title: MASK FRAME AND DEPOSITION APPARATUS INCLUDING THE SAME
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Application No.: US17375228Application Date: 2021-07-14
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Publication No.: US20220127710A1Publication Date: 2022-04-28
- Inventor: JONGYOON LEE , SEUNGJIN LEE
- Applicant: Samsung Display Co.,Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: Samsung Display Co.,Ltd.
- Current Assignee: Samsung Display Co.,Ltd.
- Current Assignee Address: KR Yongin-Si
- Priority: KR10-2020-0141198 20201028
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00

Abstract:
A mask frame includes a support substrate including a plurality of inner side surfaces. The plurality of inner side surfaces defines a first opening through the support substrate. A heat dissipation plate is disposed on the plurality of inner side surfaces. A plurality of fixing portions is disposed between the support substrate and the heat dissipation plate. The plurality of fixing portions includes a plurality of adhesive portions attaching the support substrate to the heat dissipation plate.
Public/Granted literature
- US11753711B2 Mask frame and deposition apparatus including the same Public/Granted day:2023-09-12
Information query
IPC分类: