Invention Application
- Patent Title: ADSORBENT-TYPE STORAGE AND DELIVERY VESSELS WITH HIGH PURITY DELIVERY OF GAS, AND RELATED METHODS
-
Application No.: US17505735Application Date: 2021-10-20
-
Publication No.: US20220128196A1Publication Date: 2022-04-28
- Inventor: Joseph R. DESPRES , Joseph SWEENEY , Edward A. STURM
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: F17C11/00
- IPC: F17C11/00 ; B01D53/02 ; B01J20/30 ; B01J20/20

Abstract:
Described are storage and dispensing systems and related methods, for the storage and selective dispensing germane a reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium at an interior of a storage vessel and wherein the methods and dispensing systems provide dispensing of the reagent gas from the storage vessel with a reduced level of atmospheric impurities contained in the dispensed reagent gas.
Information query