Invention Application
- Patent Title: PHOTOACOUSTIC SENSOR VALVE
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Application No.: US17647403Application Date: 2022-01-07
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Publication No.: US20220128515A1Publication Date: 2022-04-28
- Inventor: Johannes Manz , Wolfgang Klein , David Tumpold
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Main IPC: G01N29/24
- IPC: G01N29/24 ; G01N1/22

Abstract:
A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.
Public/Granted literature
- US11788990B2 Photoacoustic sensor valve Public/Granted day:2023-10-17
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