公开(公告)号：US20230033615A1

公开(公告)日：2023-02-02

申请号：US17938472

申请日：2022-10-06

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Christoph Glacer ,  David Tumpold

IPC: G01N21/17 ,  G01L9/00 ,  G01L13/02 ,  G01N33/00 ,  G01N29/24

Abstract: A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.

公开(公告)号：US11193881B2

公开(公告)日：2021-12-07

申请号：US16919828

申请日：2020-07-02

Applicant: Infineon Technologies AG

Inventor： Cecilia Carbonelli ,  Alessandra Fusco ,  Johannes Manz

IPC: G01N21/17

Abstract: A gas sensing device includes a photoacoustic spectrometry device, including a radiator for emitting light, a gas detection chamber for exposing a mixture of gases to the light, a microphone for detecting sound in the detection chamber, which is caused by exposing the mixture of gases to the light, and wherein the photoacoustic spectrometry device generates signal samples corresponding to a concentration of the gas in the mixture of gases based on the sound detected by the microphone, and a computing device for receiving the signal samples. The computing device includes a feature extraction block including a trained model algorithm block.

公开(公告)号：US20210025811A1

公开(公告)日：2021-01-28

申请号：US16919828

申请日：2020-07-02

Applicant: Infineon Technologies AG

Inventor： Cecilia Carbonelli ,  Alessandra Fusco ,  Johannes Manz

IPC: G01N21/17

Abstract: A gas sensing device includes a photoacoustic spectrometry device, including a radiator for emitting light, a gas detection chamber for exposing a mixture of gases to the light, a microphone for detecting sound in the detection chamber, which is caused by exposing the mixture of gases to the light, and wherein the photoacoustic spectrometry device generates signal samples corresponding to a concentration of the gas in the mixture of gases based on the sound detected by the microphone, and a computing device for receiving the signal samples. The computing device includes a feature extraction block including a trained model algorithm block.

公开(公告)号：US11519848B2

公开(公告)日：2022-12-06

申请号：US16905295

申请日：2020-06-18

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Christoph Glacer ,  David Tumpold

IPC: G01L9/00 ,  G01L13/02 ,  G01N33/00 ,  G01N21/17 ,  G01N29/24

Abstract: A MEMS photoacoustic gas sensor includes a first membrane and a second membrane opposing the first membrane and spaced apart from the first membrane by a sensing volume. The MEMS photoacoustic gas sensor includes an electromagnetic source and communication with the sensing volume to deflect the first membrane and the second membrane.

公开(公告)号：US11275057B2

公开(公告)日：2022-03-15

申请号：US16374192

申请日：2019-04-03

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Wolfgang Klein ,  David Tumpold

IPC: G01N29/24 ,  G01N1/22

Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

公开(公告)号：US20200319144A1

公开(公告)日：2020-10-08

申请号：US16374192

申请日：2019-04-03

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Wolfgang Klein ,  David Tumpold

IPC: G01N29/24 ,  G01N1/22

Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

公开(公告)号：US12241880B2

公开(公告)日：2025-03-04

申请号：US17499285

申请日：2021-10-12

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Guillaume Dumas ,  Johannes Manz

IPC: G01N33/00 ,  G01N21/17 ,  G01N21/3504 ,  G01N21/3577 ,  G01N29/02 ,  G01N29/24

Abstract: An emitter for emitting radiations at a specific wavelength includes a Joule-heated emitting electrical conductor to emit radiations at an emission temperature, a controller to control a variable voltage subjected to the Joule-heated emitting electrical conductor and modulated according to a duty cycle, the duty cycle being variable between a high-average power duty cycle during hot periods, so that the Joule-heated emitting electrical conductor is subjected to a high-average power to reach and maintain the emission temperature; and a low-average power duty cycle during cold periods alternated to the hot periods, so that the Joule-heated emitting electrical conductor is subjected to a low-average power to reach a temperature smaller than the emission temperature, wherein the high-average power duty cycle and the low-average power duty cycle is defined based on a temperature-indicative measured value indicative of the ambient temperature as measured.

公开(公告)号：US20220137016A1

公开(公告)日：2022-05-05

申请号：US17499285

申请日：2021-10-12

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Guillaume Dumas ,  Johannes Manz

IPC: G01N33/00

Abstract: An emitter for emitting radiations at a specific wavelength includes a Joule-heated emitting electrical conductor to emit radiations at an emission temperature, a controller to control a variable voltage subjected to the Joule-heated emitting electrical conductor and modulated according to a duty cycle, the duty cycle being variable between a high-average power duty cycle during hot periods, so that the Joule-heated emitting electrical conductor is subjected to a high-average power to reach and maintain the emission temperature; and a low-average power duty cycle during cold periods alternated to the hot periods, so that the Joule-heated emitting electrical conductor is subjected to a low-average power to reach a temperature smaller than the emission temperature, wherein the high-average power duty cycle and the low-average power duty cycle is defined based on a temperature-indicative measured value indicative of the ambient temperature as measured.

公开(公告)号：US10370242B2

公开(公告)日：2019-08-06

申请号：US15662389

申请日：2017-07-28

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Matthias Friedrich Herrmann ,  Johannes Manz

IPC: B81B7/00 ,  B81B3/00 ,  B81C1/00

Abstract: A microelectromechanical device, a microelectromechanical system, and a method of manufacturing a microelectromechanical device, wherein the microelectromechanical device may include: a substrate; a diaphragm mounted to the substrate; a first electrode mounted to the diaphragm; a second electrode mounted to the substrate; wherein the first electrode is laterally adjacent to the second electrode; and wherein the diaphragm is arranged over a gap between the first electrode and the second electrode.

公开(公告)号：US11788990B2

公开(公告)日：2023-10-17

申请号：US17647403

申请日：2022-01-07

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Wolfgang Klein ,  David Tumpold

IPC: G01N29/24 ,  G01N1/22

CPC classification number: G01N29/2425 ,  G01N1/22

Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.