Invention Application
- Patent Title: ELECTROSTATIC CHUCK WITH POWDER COATING
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Application No.: US17429909Application Date: 2020-02-14
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Publication No.: US20220130705A1Publication Date: 2022-04-28
- Inventor: Jeremy George SMITH , Oleksandr MIKHNENKO , Slobodan MITROVIC
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2020/018349 WO 20200214
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32 ; C23C16/455 ; C23C16/458 ; C23C16/02
Abstract:
An electrostatic chuck (ESC) is provided. An ESC body is provided. An organic coating is disposed on at least a surface of the ESC body
Information query
IPC分类:
