Invention Application
- Patent Title: MULTI-CHANNEL GATE-ALL-AROUND HIGH-ELECTRON-MOBILITY TRANSISTOR
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Application No.: US17077807Application Date: 2020-10-22
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Publication No.: US20220131013A1Publication Date: 2022-04-28
- Inventor: Chenjie TANG , Gengming TAO , Ye LU , Bin YANG , Xia LI
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/06 ; H01L29/205 ; H01L29/423 ; H01L21/02 ; H01L29/66

Abstract:
Certain aspects of the present disclosure generally relate to a semiconductor device implemented with multiple channels in a gate-all-around (GAA) high-electron-mobility transistor (HEMT) and techniques for fabricating such a device. One example semiconductor device generally includes a substrate; a first gate layer disposed above the substrate; a first barrier layer disposed above the first gate layer; a first channel region disposed above the first barrier layer; a second barrier layer disposed above the first channel region; a second gate layer disposed above the second barrier layer; a third barrier layer disposed above the second gate layer; a second channel region disposed above the third barrier layer; a fourth barrier layer disposed above the second channel region; a source region; and a drain region.
Information query
IPC分类: