- 专利标题: METHOD FOR CUTTING SILICON ROD AND APPARATUS FOR DIMAOND MULTI-WIRE CUTTING
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申请号: US17279600申请日: 2020-07-24
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公开(公告)号: US20220134600A1公开(公告)日: 2022-05-05
- 发明人: Jiazhen ZHENG , Kinpeng LOW , Haitang GAO
- 申请人: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY CO., LTD.
- 申请人地址: CN Xuzhou, Jiangsu
- 专利权人: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY CO., LTD.
- 当前专利权人: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Xuzhou, Jiangsu
- 优先权: CN201910671681.7 20190724,CN201910671692.5 20190724,CN201910672370.2 20190724,CN201921178864.7 20190724
- 国际申请: PCT/CN2020/104070 WO 20200724
- 主分类号: B28D7/02
- IPC分类号: B28D7/02 ; B28D5/04
摘要:
Provided are a method for cutting silicon rod and an apparatus for diamond multi-wire cutting, the method for cutting silicon rod includes: using a cooling pipe to supply cutting fluid to the diamond wire, and using the diamond wire to cut the silicon rod, wherein the distance between the supply position of the cutting fluid and the periphery of the silicon rod is 10-20 mm; or adjusting the new wire running amount and/or feed speed at different positions of the crystal cross section during the cutting process.
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