Invention Application
- Patent Title: METHODS AND APPARATUS FOR ELECTRON BACKSCATTER DIFFRACTION SAMPLE CHARACTERISATION
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Application No.: US17427791Application Date: 2020-03-03
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Publication No.: US20220136985A1Publication Date: 2022-05-05
- Inventor: Austin Penrose DAY , Christopher James STEPHENS , Pavel STEJSKAL , Martin PETREK
- Applicant: VG SYSTEMS LIMITED , FEI Company
- Applicant Address: GB Altrincham, Cheshire; US OR Hillsboro
- Assignee: VG SYSTEMS LIMITED,FEI Company
- Current Assignee: VG SYSTEMS LIMITED,FEI Company
- Current Assignee Address: GB Altrincham, Cheshire; US OR Hillsboro
- Priority: EP19160632.6 20190304
- International Application: PCT/EP2020/055588 WO 20200303
- Main IPC: G01N23/203
- IPC: G01N23/203

Abstract:
A method of analyzing a sample imaged by electron backscatter diffraction. The method comprises identifying a plurality of Kikuchi bands in an electron backscatter diffraction image of a position on the sample. The method further comprises forming, for each identified Kikuchi band, a respective vector representation of said Kikuchi band based at least in part on an estimate of the position on the sample. A configuration of the sample is determined by identifying a particular set of expected vector representations from a plurality of sets of expected vector representations as matching the vector representations of the plurality of identified Kikuchi bands.
Public/Granted literature
- US12099024B2 Methods and apparatus for electron backscatter diffraction sample characterisation Public/Granted day:2024-09-24
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