- 专利标题: TRANSISTOR DEVICES AND METHODS OF FORMING TRANSISTOR DEVICES
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申请号: US17086501申请日: 2020-11-02
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公开(公告)号: US20220140096A1公开(公告)日: 2022-05-05
- 发明人: Jiacheng LEI , James JERRY JOSEPH , Khee Yong LIM , Lulu PENG , Lawrence Selvaraj SUSAI
- 申请人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 当前专利权人: GLOBALFOUNDRIES Singapore Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/10 ; H01L29/66 ; H01L29/778 ; H01L29/40
摘要:
A transistor device may be provided, including a substrate; a buffer layer arranged over the substrate; a source terminal, a drain terminal, and a gate terminal arranged over the buffer layer; a barrier layer arranged over the buffer layer; and a passivation layer arranged over the barrier layer. The gate terminal may be arranged laterally between the source terminal and the drain terminal, the barrier layer may include a recess laterally between the gate terminal and the drain terminal, a part of the gate terminal may be arranged over the passivation layer and the passivation layer may extend into the recess of the barrier layer.
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