Invention Application
- Patent Title: POD CLEANING PROCESS
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Application No.: US17527214Application Date: 2021-11-16
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Publication No.: US20220152658A1Publication Date: 2022-05-19
- Inventor: Young Soo PARK , Dong Geun HUR , Ki Man LEE
- Applicant: STI Co., Ltd.
- Applicant Address: KR Anseong-si
- Assignee: STI Co., Ltd.
- Current Assignee: STI Co., Ltd.
- Current Assignee Address: KR Anseong-si
- Priority: KR10-2020-0152757 20201116
- Main IPC: B08B3/02
- IPC: B08B3/02 ; G03F7/20 ; F26B3/30 ; F26B3/04

Abstract:
Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.
Public/Granted literature
- US12251736B2 Pod cleaning process Public/Granted day:2025-03-18
Information query
IPC分类: