公开(公告)号：US20220152660A1

公开(公告)日：2022-05-19

申请号：US17527211

申请日：2021-11-16

Applicant: STI Co., Ltd.

Inventor： Young Soo PARK ,  Dong Geun HUR ,  Ki Man LEE

IPC: B08B3/02 ,  B08B13/00 ,  F26B3/30 ,  F26B3/04 ,  G03F7/20

Abstract: Proposed is a POD cleaning chamber including: a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD; a drying chamber including an exit door and drying the separations POD transferred from the cleaning sub-chamber; a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber.

公开(公告)号：US20220152658A1

公开(公告)日：2022-05-19

申请号：US17527214

申请日：2021-11-16

Applicant: STI Co., Ltd.

Inventor： Young Soo PARK ,  Dong Geun HUR ,  Ki Man LEE

IPC: B08B3/02 ,  G03F7/20 ,  F26B3/30 ,  F26B3/04

Abstract: Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.

公开(公告)号：US20220152661A1

公开(公告)日：2022-05-19

申请号：US17527276

申请日：2021-11-16

Applicant: STI Co., Ltd.

Inventor： Young Soo PARK ,  Dong Geun HUR ,  Ki Man LEE

IPC: B08B3/02 ,  G03F7/20 ,  F26B25/14

Abstract: Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation POD transported by the first transportation unit is cleaned and dried; a chamber in which the separation POD dried in the cleaning chamber is vacuum-processed; a second transportation transporting the separation dried in the cleaning chamber to the vacuum chamber; and an assembly unit assembling the vacuum-processed separation PODs, in which each of the plurality of cleaning chambers includes: a cleaning sub-chamber where the separation POD transported by the first transportation unit is accommodated and cleaned; and a drying chamber where the separation POD transported from the cleaning sub-chamber is dried, and in which the cleaning sub-chamber and the drying chamber are spatially separated.