Invention Application
- Patent Title: POD CLEANING DEVICE
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Application No.: US17527276Application Date: 2021-11-16
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Publication No.: US20220152661A1Publication Date: 2022-05-19
- Inventor: Young Soo PARK , Dong Geun HUR , Ki Man LEE
- Applicant: STI Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: STI Co., Ltd.
- Current Assignee: STI Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Priority: KR10-2020-0152755 20201116
- Main IPC: B08B3/02
- IPC: B08B3/02 ; G03F7/20 ; F26B25/14

Abstract:
Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation POD transported by the first transportation unit is cleaned and dried; a chamber in which the separation POD dried in the cleaning chamber is vacuum-processed; a second transportation transporting the separation dried in the cleaning chamber to the vacuum chamber; and an assembly unit assembling the vacuum-processed separation PODs, in which each of the plurality of cleaning chambers includes: a cleaning sub-chamber where the separation POD transported by the first transportation unit is accommodated and cleaned; and a drying chamber where the separation POD transported from the cleaning sub-chamber is dried, and in which the cleaning sub-chamber and the drying chamber are spatially separated.
Information query
IPC分类: