Invention Application
- Patent Title: MIXED GAS CLUSTER ION BEAM GENERATOR AND MASS SPECTROMETER INCLUDING THE SAME
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Application No.: US17454998Application Date: 2021-11-15
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Publication No.: US20220157554A1Publication Date: 2022-05-19
- Inventor: Sang Ju LEE , Myoung Choul CHOI , Chang Min CHOI , Aram HONG , Ji Young BAEK
- Applicant: KOREA BASIC SCIENCE INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: KOREA BASIC SCIENCE INSTITUTE
- Current Assignee: KOREA BASIC SCIENCE INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2020-0155638 20201119
- Main IPC: H01J37/08
- IPC: H01J37/08

Abstract:
A mixed gas cluster ion beam generator may include a nozzle chamber to contain a first mixed gas which is a mixed gas that is a mix of a first gas and a second gas, a cluster nozzle to spray gas received from the nozzle chamber in a cluster form, an ionizer to ionize a gas cluster sprayed by the cluster nozzle, and an ion accelerator to emit an ion beam to the outside by accelerating the gas cluster ionized by the ionizer by generating a potential difference to the ionized gas cluster.
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