BURIED POWER RAILS WITH SELF-ALIGNED VIAS TO TRENCH CONTACTS
Abstract:
Transistor arrangements fabricated by forming a metal gate cut as an opening that is non-selective to the gate sidewalls are disclosed. The etch process may be used to provide a power rail if the opening is at least partially filled with an electrically conductive material. Once an electrically conductive material has been deposited within the opening to form a power rail, recessing such a material in portions of the power rail that face gate stacks of various transistors may provide further improvements in terms of reduced parasitic capacitance. A mask for a trench contact to be used to electrically couple the power rail to a S/D region of a transistor may be used as a mask when the electrically conductive material of the power rail is recessed to realize a via that is self-aligned to the trench contact.
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