Invention Application
- Patent Title: SEMICONDUCTOR DEVICE HAVING METAL INTERCONNECTS WITH DIFFERENT THICKNESSES
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Application No.: US17649637Application Date: 2022-02-01
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Publication No.: US20220157729A1Publication Date: 2022-05-19
- Inventor: Kinyip Phoa , Jui-Yen Lin , Nidhi Nidhi , Chia-Hong Jan
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L21/768

Abstract:
An apparatus includes a first metal layer, a second metal layer and a dielectric material. The first metal layer has a first thickness and a second thickness less than the first thickness, and the first metal layer comprises a first interconnect having a first thickness. The dielectric material extends between the first and second metal layers and directly contacts the first and second metal layers. The dielectric material includes a via that extends through the dielectric material. A metal material of the via directly contacts the first interconnect and the second metal layer.
Public/Granted literature
- US11830818B2 Semiconductor device having metal interconnects with different thicknesses Public/Granted day:2023-11-28
Information query
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