Invention Application
- Patent Title: SUBSTRATE FOR A FRONT-SIDE-TYPE IMAGE SENSOR AND METHOD FOR PRODUCING SUCH A SUBSTRATE
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Application No.: US17649982Application Date: 2022-02-04
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Publication No.: US20220157882A1Publication Date: 2022-05-19
- Inventor: Walter Schwarzenbach , Oleg Kononchuk , Ludovic Ecarnot , Christelle Michau
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Priority: FR1750235 20170111
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/762

Abstract:
A substrate for a front-side type image sensor includes a supporting semiconductor substrate, an electrically insulating layer, and a silicon-germanium semiconductor layer, known as the active layer. The electrically insulating layer includes a stack of dielectric and metallic layers selected such that the reflectivity of the stack in a wavelength range of between 700 nm and 3 μm is greater than the reflectivity of a silicon oxide layer having a thickness equal to that of the stack. The substrate also comprises a silicon layer between the electrically insulating layer and the silicon-germanium active layer. The disclosure also relates to a method for the production of such a substrate.
Public/Granted literature
- US11855120B2 Substrate for a front-side-type image sensor and method for producing such a substrate Public/Granted day:2023-12-26
Information query
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