Invention Application
- Patent Title: CARRIER MECHANISM FOR CLEANING AND HANDLING
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Application No.: US17307154Application Date: 2021-05-04
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Publication No.: US20220163792A1Publication Date: 2022-05-26
- Inventor: Benjamin B. Riordon , Kangkang Wang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G02B27/00
- IPC: G02B27/00 ; B08B11/02 ; B08B3/12

Abstract:
Embodiments of the present disclosure relate to a carrier mechanism for retaining optical devices. The carrier mechanism includes adjacent tray assemblies stacked such that a plurality of optical device lenses are retained therebetween. The carrier mechanism retains the plurality of optical device lenses without damaging the plurality of optical device lenses by contacting corners of the optical device lenses. The plurality of optical device lenses are retained with a plurality of support pins and a plurality of capture pins disposed in the tray assemblies. Each tray includes a plurality of openings corresponding to the plurality of optical device lenses such that fluids may contact the plurality of optical device lenses. The carrier mechanism may be utilized in multiple processing methods of the plurality of optical device lenses.
Public/Granted literature
- US11698506B2 Carrier mechanism for cleaning and handling Public/Granted day:2023-07-11
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