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公开(公告)号：US20220163792A1
公开(公告)日：2022-05-26
申请号：US17307154
申请日：2021-05-04
Applicant: Applied Materials, Inc.
Inventor： Benjamin B. Riordon , Kangkang Wang
Abstract: Embodiments of the present disclosure relate to a carrier mechanism for retaining optical devices. The carrier mechanism includes adjacent tray assemblies stacked such that a plurality of optical device lenses are retained therebetween. The carrier mechanism retains the plurality of optical device lenses without damaging the plurality of optical device lenses by contacting corners of the optical device lenses. The plurality of optical device lenses are retained with a plurality of support pins and a plurality of capture pins disposed in the tray assemblies. Each tray includes a plurality of openings corresponding to the plurality of optical device lenses such that fluids may contact the plurality of optical device lenses. The carrier mechanism may be utilized in multiple processing methods of the plurality of optical device lenses.
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公开(公告)号：US12091349B2
公开(公告)日：2024-09-17
申请号：US17836162
申请日：2022-06-09
Applicant: Applied Materials, Inc.
Inventor： Wei-Sheng Lei , Mahendran Chidambaram , Kangkang Wang , Ludovic Godet , Visweswaren Sivaramakrishnan
IPC: B23K26/38 , B23K26/00 , B23K26/0622 , B23K26/08 , B23K26/55 , C03B33/02 , C03B33/10 , C03C23/00 , B23K101/40 , B23K103/00
CPC classification number: C03B33/0222 , B23K26/0006 , B23K26/0624 , B23K26/0861 , B23K26/55 , C03B33/102 , C03C23/0025 , B23K2101/40 , B23K2103/42 , B23K2103/50 , B23K2103/54 , B23K2103/56 , B29C2791/009
Abstract: A method and apparatus for substrate dicing are described. The method includes utilizing a laser to dice a substrate along a dicing path to form a perforated line around each device within the substrate. The dicing path is created by exposing the substrate to bursts of laser pulses at different locations around each device. The laser pulses are delivered to the substrate and may have a pulse repetition frequency of greater than about 25 MHz, a pulse width of less than about 15 picoseconds, and a laser wavelength of about 1.0 μm to about 5 μm.
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公开(公告)号：US11975422B2
公开(公告)日：2024-05-07
申请号：US18061327
申请日：2022-12-02
Applicant: Applied Materials, Inc.
Inventor： Yaseer Arafath Ahamed , Kangkang Wang , Benjamin B. Riordon , James D. Strassner , Ludovic Godet
CPC classification number: B25B11/005 , G02B1/002 , G02B6/10
Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.
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Patent Agency Ranking
公开(公告)号：US11850621B2
公开(公告)日：2023-12-26
申请号：US17456410
申请日：2021-11-24
Applicant: Applied Materials, Inc.
Inventor： Kangkang Wang , Yaseer Arafath Ahamed , Yige Gao , Benjamin B. Riordon , Rami Hourani , James D. Strassner , Ludovic Godet , Thinh Nguyen
Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.
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公开(公告)号：US11698506B2
公开(公告)日：2023-07-11
申请号：US17307154
申请日：2021-05-04
Applicant: Applied Materials, Inc.
Inventor： Benjamin B. Riordon , Kangkang Wang
IPC: G02B7/00
CPC classification number: G02B7/00
Abstract: Embodiments of the present disclosure relate to a carrier mechanism for retaining optical devices. The carrier mechanism includes adjacent tray assemblies stacked such that a plurality of optical device lenses are retained therebetween. The carrier mechanism retains the plurality of optical device lenses without damaging the plurality of optical device lenses by contacting corners of the optical device lenses. The plurality of optical device lenses are retained with a plurality of support pins and a plurality of capture pins disposed in the tray assemblies. Each tray includes a plurality of openings corresponding to the plurality of optical device lenses such that fluids may contact the plurality of optical device lenses. The carrier mechanism may be utilized in multiple processing methods of the plurality of optical device lenses.
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公开(公告)号：US20220305588A1
公开(公告)日：2022-09-29
申请号：US17655629
申请日：2022-03-21
Applicant: Applied Materials, Inc.
Inventor： Wei-Sheng LEI , Mahendran Chidambaram , Kangkang Wang , Ludovic Godet , Visweswaren Sivaramakrishnan
IPC: B23K26/364 , B23K26/40 , B23K26/38
Abstract: Embodiments of the present disclosure relate to methods for dicing one or more optical devices from a substrate with a laser machining system. The laser machining system utilizes a laser to perform methods for dicing one or more optical devices from a substrate along a dicing path. The methods use one of forming a plurality of laser spots along the dicing path or forming a plurality of trenches along the dicing path.
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公开(公告)号：US12121925B2
公开(公告)日：2024-10-22
申请号：US18506799
申请日：2023-11-10
Applicant: Applied Materials, Inc.
Inventor： Kangkang Wang , Yaseer Arafath Ahamed , Yige Gao , Benjamin B. Riordon , Rami Hourani , James D. Strassner , Ludovic Godet , Thinh Nguyen
Abstract: An optical device coating assembly is provided. The optical device coating assembly includes a substrate support operable to retain an optical device substrate. The coating assembly further includes a first actuator connected to the substrate support. The first actuator is configured to rotate the substrate support. The coating assembly includes a holder configured to hold a coating applicator against an edge of the optical device substrate when the optical device substrate is rotated on the substrate support and a second actuator operable to apply a force on the holder in a direction towards the substrate support. The second actuator is a constant force actuator.
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公开(公告)号：US11524392B2
公开(公告)日：2022-12-13
申请号：US17237533
申请日：2021-04-22
Applicant: Applied Materials, Inc.
Inventor： Yaseer Arafath Ahamed , Kangkang Wang , Benjamin B. Riordon , James D. Strassner , Ludovic Godet
Abstract: Embodiments described herein provide for devices and methods for retaining optical devices. The devices and methods described herein provide for retention of the substrate without contacting sensitive portions of the substrate. The devices and methods utilize retention pads or vacuum pins to contact the exclusion zones i.e., inactive areas of the substrate to retain the substrate and prevent the substrate from moving laterally. Additionally, a holding force retains the substrate in the vertical direction, without contacting the substrate. The methods provide for adjusting the devices to account for multiple geometries of the substrate. The methods further provide for adjusting the devices, such as adjusting a gap between the optical device and a suction pad, to alter the holding force of the devices on the optical devices.
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