- 专利标题： THREE-DIMENSIONAL NANO-PATTERNS
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申请号： US17432931申请日： 2020-02-23
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公开(公告)号： US20220170148A1公开(公告)日： 2022-06-02
- 发明人: Tamar SEGAL-PERETZ , Barun Kumar BARICK , Rotem AZOULAY
- 申请人： TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITED
- 申请人地址： IL Haifa
- 专利权人： TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITED
- 当前专利权人： TECHNION RESEARCH & DEVELOPMENT FOUNDATION LIMITED
- 当前专利权人地址： IL Haifa
- 国际申请： PCT/IL2020/050196 WO 20200223
- 主分类号： C23C16/04
- IPC分类号： C23C16/04 ; C23C16/455 ; C23C16/02 ; C23C16/56 ; B82B3/00
摘要：
A method for making 3D nano-structure comprising at least two materials by spatially controlling the growth of the materials, is provided. Further, a method for making 3D nano-structure bound to a thermally labile substrate is provided. Composites, comprising a substrate bound to a 3D nano-structure, wherein the 3D nano-structure is arranged in a pattern are provided.
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