Invention Application
- Patent Title: MODULAR LINEAR ACCELERATOR ASSEMBLY
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Application No.: US17112576Application Date: 2020-12-04
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Publication No.: US20220183137A1Publication Date: 2022-06-09
- Inventor: Frank Sinclair , Paul J. Murphy , Michael Honan , Charles T. Carlson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H05H7/18
- IPC: H05H7/18 ; H01J37/317

Abstract:
Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.
Public/Granted literature
- US11665810B2 Modular linear accelerator assembly Public/Granted day:2023-05-30
Information query
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