Invention Application
- Patent Title: SURFACE COATING TREATMENT
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Application No.: US17600031Application Date: 2020-04-13
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Publication No.: US20220186354A1Publication Date: 2022-06-16
- Inventor: Ann ERICKSON , John DAUGHERTY , Robin KOSHY
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- International Application: PCT/US2020/027979 WO 20200413
- Main IPC: C23C4/11
- IPC: C23C4/11 ; C23C28/04 ; C25D11/18 ; C23C16/455 ; C23C16/44

Abstract:
A component for use as part of a plasma processing chamber is provided. The component has a component body adapted for use as part of a plasma processing chamber. A first ceramic coating of a ceramic material is on a surface of the component body, wherein the first ceramic coating has a first side adjacent to the component body and a second side spaced apart from the component body and wherein the first ceramic coating has a porosity and density. A second ceramic coating of the ceramic material is on the second side of the first ceramic coating, wherein the second ceramic coating has a porosity that is less than the porosity of the first ceramic coating and the second ceramic coating has a density that is greater than the density of the first ceramic coating.
Information query
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