Invention Application
- Patent Title: CONTAMINATION TRAP
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Application No.: US17603687Application Date: 2020-03-10
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Publication No.: US20220197158A1Publication Date: 2022-06-23
- Inventor: Sander Catharina Reinier DERKS , Daneil Jozel Maria DIRECKS , Marurice Wilhelmus Leonardus Hendricu FEIJTS , Pieter Geradus Mathijs HOEIJMAKERS , Katja Cornelia Joanna Clasina MOORS , Violeta NAVARRO PAREDES , William Peter VAN DRENTS , Jan Steven Christiaan WESTERLAKEN
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Vekdgiveb
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Vekdgiveb
- Priority: EP19169778.8 20190417
- International Application: PCT/EP2020/056344 WO 20200310
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00

Abstract:
A contamination trap for use in a debris mitigation system of a radiation source, the contamination trap comprising a plurality of vanes configured to trap fuel debris emitted from a plasma formation region of the radiation source; wherein at least one vane or each vane of the plurality of vanes comprises a material comprising a thermal conductivity above 30 W m−1K−1.
Public/Granted literature
- US11556067B2 Contamination trap Public/Granted day:2023-01-17
Information query
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