Invention Application
- Patent Title: APPARATUS AND METHOD FOR MANUFACTURING A WAFER
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Application No.: US17695400Application Date: 2022-03-15
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Publication No.: US20220208541A1Publication Date: 2022-06-30
- Inventor: Ruggero ANZALONE , Nicolo' FRAZZETTO
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/16 ; H01L21/683 ; C23C16/01 ; C23C16/32

Abstract:
Various embodiments provide an apparatus and method for fabricating a wafer, such as a SiC wafer. The apparatus includes a support having a plurality of arms for supporting a substrate. The arms allows for physical contact between the support and the substrate to be minimized. As a result, when the substrate is melted, surface tension between the arms and molten material is reduced, and the molten material will be less likely to cling to the support.
Public/Granted literature
- US11830724B2 Apparatus and method for manufacturing a wafer Public/Granted day:2023-11-28
Information query
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