An object is to achieve a manufacturing apparatus that can fully automate the manufacturing of a solid-state secondary battery. A mask alignment chamber, a first transfer chamber connected to the mask alignment chamber, a second transfer chamber connected to the first transfer chamber, a first film formation chamber connected to the second transfer chamber, a third transfer chamber connected to the first transfer chamber, and a second film formation chamber connected to the third transfer chamber are included. The first film formation chamber has a function of forming a positive electrode active material layer or a negative electrode active material layer by a sputtering method, the second film formation chamber has a function of forming a solid electrolyte layer by co-evaporation of an organic complex of lithium and SiOx (0