- 专利标题: QUANTUM CASCADE LASER DEVICES WITH IMPROVED HEAT EXTRACTION
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申请号: US17138829申请日: 2020-12-30
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公开(公告)号: US20220209498A1公开(公告)日: 2022-06-30
- 发明人: Seungyong JUNG , Mikhail A. BELKIN
- 申请人: TRANSWAVE PHOTONICS, LLC.
- 申请人地址: US TX Austin
- 专利权人: TRANSWAVE PHOTONICS, LLC.
- 当前专利权人: TRANSWAVE PHOTONICS, LLC.
- 当前专利权人地址: US TX Austin
- 主分类号: H01S5/024
- IPC分类号: H01S5/024 ; H01S5/34 ; G02B6/12 ; H01S5/0234 ; H01S5/02 ; H01S5/02355
摘要:
Structures and methods for reducing the thermal resistance of quantum cascade laser (QCL) devices and QCL-based photonic integrated circuits (QCL-PIC) are provided. In various embodiments, the native substrate of QCL and QCL-PIC devices is replaced with a foreign substrate that has very high thermal conductivity, for example, using wafer bonding methods. In some examples, wafer bonding of processed, semi-processed, or unprocessed QCL and QCL-PIC epilayers or devices on their native substrate to a high-thermal-conductivity substrate is performed, followed by removal of the native substrate via selective etching, and performing additional device processing if necessary. Thereafter, in some embodiments, cleaving or dicing individual devices from the bonded wafers may be performed, for example, for mounting onto heat sinks.
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