Invention Application
- Patent Title: TOP ELECTRODE INTERCONNECT STRUCTURES
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Application No.: US17702255Application Date: 2022-03-23
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Publication No.: US20220216148A1Publication Date: 2022-07-07
- Inventor: Il Goo KIM , Roderick A. AUGUR
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US NY Malta
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L27/24 ; H01L27/22

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to top electrode interconnect structures and methods of manufacture. The structure includes: a lower metallization feature; an upper metallization feature; a bottom electrode in direct contact with the lower metallization feature; one or more switching materials over the bottom electrode; a top electrode over the one or more switching materials; and a self-aligned via interconnection in contact with the top electrode and the upper metallization feature.
Public/Granted literature
- US11810853B2 Top electrode interconnect structures Public/Granted day:2023-11-07
Information query
IPC分类: