Invention Application
- Patent Title: MASK AND METHOD OF MANUFACTURING MASK
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Application No.: US17703195Application Date: 2022-03-24
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Publication No.: US20220216405A1Publication Date: 2022-07-07
- Inventor: Inkyung YOO , SangJin PARK , Donghyun YANG , Sungbae JU
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2018-0139876 20181114
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56

Abstract:
A method for manufacturing a mask includes providing a mask mother substrate including a first portion and a plurality of second portions adjacent to the first portion, forming a reflecting plate on the mask mother substrate, forming a photoresist layer on the reflecting plate, removing a third portion of the photoresist layer that overlaps the plurality of second portions using an auxiliary mask, removing a fourth portion of the reflecting plate that overlaps the plurality of second portions, and removing the plurality of second portions of the mask mother substrate using a laser.
Public/Granted literature
- US11594681B2 Mask and method of manufacturing mask Public/Granted day:2023-02-28
Information query
IPC分类: