Invention Application
- Patent Title: BOLOMETER HAVING AN ALIGNMENT LAYER OF CARBON NANOTUBES AND METHOD FOR MANUFACTURING SAME
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Application No.: US17612325Application Date: 2019-05-21
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Publication No.: US20220221346A1Publication Date: 2022-07-14
- Inventor: Ryota YUGE , Noriyuki TONOUCH
- Applicant: NEC Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- Priority: JP2019-096953 20190523
- International Application: PCT/JP2020/020123 WO 20190521
- Main IPC: G01J5/22
- IPC: G01J5/22

Abstract:
An object of the present invention is to provide a bolometer having a high TCR value and a low resistance, and a method for manufacturing the infrared sensor. One aspect of the present embodiment relates to a bolometer comprising: a substrate; a first electrode on the substrate; a second electrode spaced from the first electrode on the substrate; and a carbon nanotube layer electrically connected to the first electrode and the second electrode, wherein the carbon nanotube layer comprises 90% by mass or more of semiconducting carbon nanotubes based on the total amount of carbon nanotubes, and the carbon nanotube layer has an alignment satisfying: fx/fy≥2 where an integrated value f of amplitudes of frequencies from −1 μm−1 to +1 μm−1 in one direction from the center is calculated in an image obtained by performing two-dimensional fast Fourier transform processing on an SEM image of the carbon nanotube layer, and an integrated value for a direction x in which the integrated value f becomes maximum is defined as fx and an integrated value for a direction y perpendicular to the direction x is defined as fy.
Public/Granted literature
- US12292336B2 Bolometer having an alignment layer of carbon nanotubes and method for manufacturing same Public/Granted day:2025-05-06
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