Invention Application
- Patent Title: SEMICONDUCTOR DEVICE INCLUDING FIN FIELD EFFECT TRANSISTOR
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Application No.: US17705565Application Date: 2022-03-28
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Publication No.: US20220223592A1Publication Date: 2022-07-14
- Inventor: Seonghwa PARK , Hongbae PARK , Jaehyun LEE , Jonghan LEE , Dabok JEONG , Minseok JO
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2018-0106428 20180906
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L21/8234 ; H01L21/308

Abstract:
A semiconductor device includes a first gate pattern and a second gate pattern on a substrate, the first gate pattern and the second gate pattern being spaced apart from each other, and a separation pattern that separates the first gate pattern and the second gate pattern from each other. The first gate pattern includes a first high-k dielectric pattern and a first metal-containing pattern on the first high-k dielectric pattern, the first metal-containing pattern covering a sidewall of the first high-k dielectric pattern. The second gate pattern includes a second high-k dielectric pattern and a second metal-containing pattern on the second high-k dielectric pattern, and the separation pattern is in direct contact with the first metal-containing pattern and spaced apart from the first high-k dielectric pattern.
Information query
IPC分类: