- 专利标题: EDGE COUPLERS IN THE BACK-END-OF-LINE STACK OF A PHOTONICS CHIP
-
申请号: US17151955申请日: 2021-01-19
-
公开(公告)号: US20220229250A1公开(公告)日: 2022-07-21
- 发明人: Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
- 申请人: GLOBALFOUNDRIES U.S. Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人: GLOBALFOUNDRIES U.S. Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: G02B6/42
- IPC分类号: G02B6/42 ; F21V8/00 ; G02B6/30
摘要:
Structures including an edge coupler and methods of forming a structure including an edge coupler. The structure includes a waveguide core over a dielectric layer and a back-end-of-line stack over the dielectric layer and the waveguide core. The back-end-of-line stack includes a side edge and a truncated layer that is overlapped with a tapered section of the waveguide core. The truncated layer has a first end surface adjacent to the side edge and a second end surface above the tapered section of the waveguide core. The truncated layer is tapered from the first end surface to the second end surface.
公开/授权文献
信息查询