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公开(公告)号：US11415744B1
公开(公告)日：2022-08-16
申请号：US17170203
申请日：2021-02-08
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur , Abdelsalam Aboketaf
Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.
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公开(公告)号：US20220221714A1
公开(公告)日：2022-07-14
申请号：US17146509
申请日：2021-01-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Won Suk Lee , Thomas G. Weeks, III , Michal Rakowski , Yusheng Bian , Roderick A. Augur , Alexander L. Martin , Petar I. Todorov
Abstract: Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.
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公开(公告)号：US20220221650A1
公开(公告)日：2022-07-14
申请号：US17146864
申请日：2021-01-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy , Edward Kiewra , Steven M. Shank
Abstract: Structures including a grating coupler and methods of fabricating a structure including a grating coupler. The structure includes structure includes a dielectric layer on a substrate, a first waveguide core positioned in a first level over the dielectric layer, and a second waveguide core positioned in a second level over the dielectric layer. The second level differs in elevation above the dielectric layer from the first level. The first waveguide core includes a tapered section. The structure further includes a grating coupler having a plurality of segments positioned in the second level adjacent to the second waveguide core. The segments of the grating coupler and the tapered section of the first waveguide core are positioned in an overlapping arrangement.
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公开(公告)号：US11348867B2
公开(公告)日：2022-05-31
申请号：US17089775
申请日：2020-11-05
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor： Dewei Xu , Sunil K. Singh , Seung-Yeop Kook , Roderick A. Augur
IPC: H01L23/522 , H01L49/02
Abstract: Embodiments of the disclosure provide a capacitor for an integrated circuit (IC). The capacitor may include a first vertical electrode on an upper surface of a first conductor within a first wiring layer. A capacitor dielectric may be on an upper surface of the first vertical electrode. A second vertical electrode may be on an upper surface of the capacitor dielectric. The second vertical electrode is vertically between the capacitor dielectric and a second conductor. An inter-level dielectric (ILD) layer is adjacent to each of the first vertical electrode, the capacitor dielectric, and the second vertical electrode. The ILD layer is vertically between the first conductor and the second conductor.
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公开(公告)号：US20220139819A1
公开(公告)日：2022-05-05
申请号：US17089775
申请日：2020-11-05
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor： Dewei Xu , Sunil K. Singh , Seung-Yeop Kook , Roderick A. Augur
IPC: H01L23/522 , H01L49/02
Abstract: Embodiments of the disclosure provide a capacitor for an integrated circuit (IC). The capacitor may include a first vertical electrode on an upper surface of a first conductor within a first wiring layer. A capacitor dielectric may be on an upper surface of the first vertical electrode. A second vertical electrode may be on an upper surface of the capacitor dielectric. The second vertical electrode is vertically between the capacitor dielectric and a second conductor. An inter-level dielectric (ILD) layer is adjacent to each of the first vertical electrode, the capacitor dielectric, and the second vertical electrode. The ILD layer is vertically between the first conductor and the second conductor.
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Patent Agency Ranking
公开(公告)号：US11280961B1
公开(公告)日：2022-03-22
申请号：US17113567
申请日：2020-12-07
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur
Abstract: Structures for an optical power splitter and methods of forming a structure for an optical power splitter. A splitter body defines a multimode interference region of the optical power splitter. A first side element positioned adjacent to a first side surface of the splitter body, and a second side element positioned adjacent to a second side surface of the splitter body.
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公开(公告)号：US20230117802A1
公开(公告)日：2023-04-20
申请号：US18083716
申请日：2022-12-19
Applicant: GlobalFoundries U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
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公开(公告)号：US20230083198A1
公开(公告)日：2023-03-16
申请号：US17475689
申请日：2021-09-15
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur
IPC: G02B6/42
Abstract: Structures including an optical coupler and methods of fabricating a structure including an optical coupler. The structure includes a substrate, a first dielectric layer on the substrate, and an optical coupler having a first grating and a second grating. The first grating has a first plurality of segments positioned in a first level over the first dielectric layer. The second grating has a second plurality of segments positioned in a second level over the first dielectric layer. The second level differs in elevation above the first dielectric layer from the first level. The second plurality of segments are positioned in the second level to overlap with the first plurality of segments of the first grating, and the second plurality of segments comprise a metal. A second dielectric layer is positioned in a vertical direction between the first level and the second level.
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公开(公告)号：US11567261B2
公开(公告)日：2023-01-31
申请号：US17173639
申请日：2021-02-11
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Yusheng Bian , Roderick A. Augur , Kenneth J. Giewont , Karen Nummy
Abstract: Structures for an edge coupler and methods of forming a structure for an edge coupler. The structure includes a waveguide core over a dielectric layer, and a back-end-of-line stack over the waveguide core and the dielectric layer. The back-end-of-line stack includes an interlayer dielectric layer, a side edge, a first feature, a second feature, and a third feature laterally arranged between the first feature and the second feature. The first feature, the second feature, and the third feature are positioned on the interlayer dielectric layer adjacent to the side edge, and the third feature has an overlapping relationship with a tapered section of the waveguide core.
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公开(公告)号：US20220244457A1
公开(公告)日：2022-08-04
申请号：US17162303
申请日：2021-01-29
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor： Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur
Abstract: Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are spaced along a longitudinal axis. Each segment is inclined relative to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature that is inverted relative to the first curvature.
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