Invention Application

FLUID CONTROL DEVICE
Abstract:
A fluid control device includes piezoelectric pumps and a substrate. The substrate includes dielectric base members. Each of the dielectric base members has a recess and a through-hole. Each of the dielectric base members is laminated such that the recesses of the dielectric base members partially overlap and communicate with each other. A portion of the recesses not overlapping with the dielectric base member serve as a first opening and a second opening, respectively, to the outside. The first opening and the second opening open in opposite directions in the lamination direction. The first opening and the second opening have shapes that may be fit to each other. The piezoelectric pump is on the dielectric base member to communicate with the through-hole, and the piezoelectric pump is on the dielectric base member to communicate with the through-hole.
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