Invention Application
- Patent Title: FLUID CONTROL DEVICE
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Application No.: US17659673Application Date: 2022-04-19
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Publication No.: US20220235761A1Publication Date: 2022-07-28
- Inventor: Shinichiro MATSUMOTO , Masahiro SASAKI
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Priority: JP2019-191636 20191021
- Main IPC: F04B53/16
- IPC: F04B53/16 ; F04B43/04 ; F04B53/22 ; F04B23/04

Abstract:
A fluid control device includes piezoelectric pumps and a substrate. The substrate includes dielectric base members. Each of the dielectric base members has a recess and a through-hole. Each of the dielectric base members is laminated such that the recesses of the dielectric base members partially overlap and communicate with each other. A portion of the recesses not overlapping with the dielectric base member serve as a first opening and a second opening, respectively, to the outside. The first opening and the second opening open in opposite directions in the lamination direction. The first opening and the second opening have shapes that may be fit to each other. The piezoelectric pump is on the dielectric base member to communicate with the through-hole, and the piezoelectric pump is on the dielectric base member to communicate with the through-hole.
Public/Granted literature
- US12276271B2 Fluid control device Public/Granted day:2025-04-15
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